Fraunhofer Gesellschaft (FHG) is Europe’s largest application-oriented research organization. Research efforts are geared entirely to people’s needs such as health, security, communication, energy and the environment. At present, Fraunhofer Gesellschaft maintains more than 80 research institutions and institutes with a total staff of about 18,000 scientists, technical and administrative personnel. The Research Institution called Microsystems and Solid-State Technologies EMFT, which is part of the Fraunhofer Gesellschaft. The Fraunhofer EMFT develops application-oriented system technologies, in particular in the field of microelectronics and microsystems engineering. EMFT offers a 200 mm CMOS technology line and flexible electronics labs with non-CMOS technologies to build devices to support the EMFT core competence “Systems and Prototypes”. Process integration of non-CMOS and CMOS technology as well as system realization are the contributions to this project.